Influence of phonon, geometry, impurity, and grain size on Copper line resistivity

Applied Physics Letters

Volumn 89, Issue 11, 2006, Pages

  Plombon, J J ^a   Andideh, Ebrahim ^a   Dubin, Valery M ^a   Maiz, Jose ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK RESISTIVITY; COPPER LINE RESISTIVITY; COPPER SURFACES; ELECTRON PHONON SCATTERING;

CRYOGENICS; ELECTRON SCATTERING; GEOMETRY; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; IMPURITIES; PHONONS;

COPPER;

EID: 33748695796     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2355435     Document Type: Article

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