Effects of nitrogen content on nanostructure evolution, mechanical behaviors and thermal stability in Ti-B-N thin films

Surface and Coatings Technology

Volumn 201, Issue 3-4, 2006, Pages 1228-1235

  Lu, Y H ^a,b   Shen, Y G ^b   Li, K Y ^b   Chen, Haydn ^b  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Mechanical behaviors; Microstructure; Nitrogen; Thermal stability; Ti B N thin films

Indexed keywords

BORON; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; METALLOGRAPHIC MICROSTRUCTURE; MICROHARDNESS; NANOSTRUCTURED MATERIALS; NITROGEN; SEGREGATION (METALLOGRAPHY); THERMODYNAMIC STABILITY; TITANIUM; X RAY PHOTOELECTRON SPECTROSCOPY;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MICROINDENTATION METHOD;

THIN FILMS;

BORON; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; METALLOGRAPHIC MICROSTRUCTURE; MICROHARDNESS; NANOSTRUCTURED MATERIALS; NITROGEN; SEGREGATION (METALLOGRAPHY); THERMODYNAMIC STABILITY; THIN FILMS; TITANIUM; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33748567456     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.01.045     Document Type: Article

References (21)

1. Gissler W. Surf. Coat. Technol. 68-69 (1994) 556
2. Vepřek S. J. Vac. Sci. Technol., A 17 5 (1999) 2401
3. Knotek O., Loffler F., Bohmer M., and Stossel C. Surf. Coat. Technol. 49 (1991) 263
4. Karner H., Laimer J., Stori H., and Rodnammer P. Surf. Coat. Technol. 39-40 (1991) 263
5. Selbach E., Schmidt K., and Wang M. Thin Solid Films 188 (1990) 267
6. Novotny H., Benesovsky F., Brukl C., and Schob O. Mh. Chem. 92 (1961) 403
7. Baker M.A., Steiner A., Haupt J., and Gissler W. J. Vac. Sci. Technol., A 13 3 (1995) 1633
8. Ruby C., Ott R., Huang F., Weaver M.L., and Barnard J.A. Surf. Interface Anal. 29 (2000) 823
9. Wiedemann R., Weihnacht V., and Oettel H. Surf. Coat. Technol. 116-119 (1999) 302
10. Karvankova P., Veprek-Heijman M.G.J., Zindulka O., Bergmaier A., and Veprek S. Surf. Coat. Technol. 163-164 (2003) 149
11. Hammer P., Steiner A., Villa R., et al. Surf. Coat Technol. 68-69 (1994) 194
12. Gissler W., Baker M.A., Haupt J., Gibson P.N., Gilmore R., and Mollart T.P. Diamond Film Technol. 7 3 (1997) 165
13. Karvánková P., Vepřek-Heijman M.G.J., Zawrak M.F., and Vepřek S. Thin Solid Films 467 (2004) 133
14. Lu Y.H., Zhou Z.F., Sit P., Shen Y.G., Li K.Y., and Chen H. Surf. Coat. Technol. 187 (2004) 98
15. Carrasco C.A., Vergara S. V., Benavente G. R., Mingolo N., and Rios J.C. Mater. Charact. 48, 81 (2002)
16. Sundgren J.E., Rockett A., and Greene J.E. J.Vac. Sci. Technol. A 4 6 (1986) 2770
17. Novotny H., Benesovsky F., Brukl C., and Schob O. Mh. Chem. 92 (1961) 403
18. Krzanowski E. Surf. Coat. Technol. 188-189 (2004) 376
19. Mollart T.P., Haupt J., Gilmore R., and Gissler W. Surf. Coat. Technol. 86-87 (1996) 231
20. Thornton J.A., and Hoffman D.W. Thin Solid Films 171 (1989) 5
21. Cahn J.W. Acta Metall. 11 (1963) 1275