Injection molding of LIGA and LIGA-similar microstructures using filled and unfilled thermoplastics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2639, Issue , 1995, Pages 146-157

  Ruprecht, R ^a   Bacher, W ^a   Hausselt J H ^a   Piotter, V ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Aligned molding; Aspect ratio; LIGA mold inserts; Microsystems technology; Plastic micromolding; Reaction injection molding; Thermoplastic injection molding; Vacuum hot embossing

Indexed keywords

ASPECT RATIO; ELECTROFORMING; ELECTROLYTES; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; TEMPERATURE CONTROL; THERMOPLASTICS;

PLASTIC MICROMOLDING;

REACTION INJECTION MOLDING;

EID: 0029418969     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.221272     Document Type: Conference Paper

References (24)

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