The diffusion of hydrogen and inert gas in sputtered a-SiC:H alloys: Microstructure study

Solar Energy Materials and Solar Cells

Volumn 90, Issue 18-19, 2006, Pages 3449-3455

  Saleh, Rosari ^a   Munisa, Lusitra ^a   Beyer, Wolfhard ^b  

^a UNIVERSITY OF INDONESIA   (Indonesia)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Amorphous films; Hydrogen effusion; SIMS; Sputtering

Indexed keywords

AMORPHOUS FILMS; ARGON; DIFFUSION; HYDROGEN; INERT GASES; MICROSTRUCTURE; SECONDARY ION MASS SPECTROMETRY; SPUTTERING;

HYDROGEN EFFUSION; IMPLANTED INERT GASES;

SILICON CARBIDE;

EID: 33748463605     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2006.04.013     Document Type: Article

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