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Volumn 11, Issue 3-6, 2002, Pages 1091-1094
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Inert gas diffusion in DLC-Si films
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Author keywords
Diamond like carbon; Diffusion; Silicon carbide; Structure
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Indexed keywords
ANNEALING;
CHEMICAL BONDS;
DIFFUSION;
INERT GASES;
MICROSTRUCTURE;
SILICON;
STIFFNESS;
NETWORK RECONSTRUCTION;
DIAMOND LIKE CARBON FILMS;
DIAMOND-LIKE CARBON;
DIFFUSION;
FILM;
HYDROGENATION;
INDUSTRIAL APPLICATION;
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EID: 0036508449
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(01)00603-3 Document Type: Article |
Times cited : (13)
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References (10)
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