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Volumn 11, Issue 3-6, 2002, Pages 1091-1094

Inert gas diffusion in DLC-Si films

Author keywords

Diamond like carbon; Diffusion; Silicon carbide; Structure

Indexed keywords

ANNEALING; CHEMICAL BONDS; DIFFUSION; INERT GASES; MICROSTRUCTURE; SILICON; STIFFNESS;

EID: 0036508449     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00603-3     Document Type: Article
Times cited : (13)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.