Infrared transmission performance of gallium phosphide thin films deposited by RF magnetron sputtering

Materials Science Forum

Volumn 475-479, Issue V, 2005, Pages 3685-3688

  Li, Yangping ^a   Liu, Zhengtang ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

Absorption; Gallium phosphide; Infrared transmission; Thin film

Indexed keywords

CHEMICAL VAPOR DEPOSITION; INFRARED TRANSMISSION; LIGHT ABSORPTION; MAGNETRON SPUTTERING; REFRACTIVE INDEX; SEMICONDUCTING GALLIUM COMPOUNDS; STRESSES; ZINC SULFIDE;

GALLIUM PHOSPHIDE; LONG WAVE INFRARED (LWIR); RADIO FREQUENCY MAGNETRON SPUTTERING; THERMOPRESSING;

DIAMOND LIKE CARBON FILMS;

EID: 17044400615     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-960-1.3685     Document Type: Conference Paper

References (5)

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2. D. R. Gibson and E. M. Waddell: SPIE Vol. 2286 (1994), P. 335
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4. Li Yangping and Liu Zhengtang: The 5th International Conference on Thin Film Physics and Application, Shanghai, China, May 31-June 2, 2004
5. Song Jianquan and Liu Zhengtang: SPIE Vol. 4086 (2000), p. 104.