Investigation on mc-Si bulk passivation using deuterated silicon-nitride

Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion

Volumn A, Issue , 2003, Pages 983-986

  Dekkers, H F W ^a   De Wolf, S ^a   Agostinelli, G ^a   Szlufcik, J ^a   Pernau, T ^b   Arnoldbik, W M ^c   Goldbach, H D ^c   Schropp, R E I ^c  

^a IMEC   (Belgium)

^b UNIVERSITY OF KONSTANZ   (Germany)

^c UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATING (ARC); BAND GAP; BULK PASSIVATION; MULTI-CRYSTALLINE SILICON;

CRYSTALLINE MATERIALS; DEPOSITION; DEUTERIUM; DIFFUSION; HEAT TREATMENT; HYDROGENATION; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SOLAR CELLS;

SILICON NITRIDE;

EID: 6444223145     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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