Impedance characteristics of carbon nitride films for humidity sensors

Sensors and Actuators, B: Chemical

Volumn 117, Issue 2, 2006, Pages 437-441

  Lee, Ji Gong ^a   Lee, Sung Pil ^a  

^a Kyungnam University   (South Korea)

Author keywords

Carbon nitride films; Humidity sensors; Reactive RF magnetron sputter; Surface analysis

Indexed keywords

CARBON NITRIDE; ELECTRIC CONDUCTIVITY; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS; HUMIDITY SENSORS; REACTIVE RF MAGNETRON SPUTTER; SURFACE ANALYSIS;

CHEMICAL SENSORS;

EID: 33748068490     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.12.049     Document Type: Article

References (16)

1. Sung C.M., and Sung M. Mater. Chem. Phys. 43 (1996) 1-18
2. Liu A.Y., and Cohen M.L. Science 245 (1989) 841-842
3. Lee J.G., and Lee S.P. J. Electroceram. 13 (2004) 321-326
4. Lee S.P., and Kang J.B. Microchem. J. 70 (2001) 239-246
5. Han H., and Feldman B.J. Solid State Commun. 65 (1988) 921-923
6. Gonzalez P., Soto R., Parada E.G., Redondas X., Chiussi S., Serra J., Pou J., Leon B., and Perez-Amor M. Appl. Surf. Sci. 109-110 (1997) 380-383
7. DeVries R.C. Mater. Res. Innovations 1 (1997) 161-162
8. Ha S.G., Lee J.G., and Lee S.P. J. Korean Phys. Soc. 45 (2004) 1268-1271
9. Lee J.G., and Lee S.P. Sens. Actuators B 108 (2005) 450-454
10. Abedinov N., Popov C., Yordanov Z., Rangelow I.W., and Kulisch W. Appl. Phys. A 79 (2004) 531-536
11. Lee J.G., and Lee S.P. Trans. EEM 5 (2004) 98-103
12. Sakai Y., Matsuguchi M., and Hurukawa T. Sens. Actuators B 66 (2000) 135-138
13. Gong M., Lee M., and Rhee H. Sens. Actuators B 73 (2001) 185-191
14. McGovern S.T., Spinks G.M., and Wallace G.G. Sens. Actuators B 107 (2005) 657-665
15. Neri G., Bonavita A., Galvagno S., Donato N., and Caddemi A. Sens. Actuators B 111-112 (2005) 71-77
16. Saha D., Giri R., Mistry K., and Sengupta K. Sens. Actuators B 107 (2005) 323-331