메뉴 건너뛰기




Volumn 1, Issue 1, 2003, Pages 150-171

Analysis of island dynamics in epitaxial growth of thin films

Author keywords

Adatom diffusion; Epitaxial growth; Island dynamics; Line tension; Linear stability; Normal velocity; Step edges; Step edge kinetics; Surface diffusion

Indexed keywords

ADATOMS; DIFFUSION; DYNAMICS; GROWTH KINETICS; KINETICS; PECLET NUMBER; SURFACE DIFFUSION; THIN FILMS;

EID: 33748064454     PISSN: 15403459     EISSN: 15403467     Source Type: Journal    
DOI: 10.1137/S1540345902407208     Document Type: Article
Times cited : (35)

References (22)
  • 1
    • 0001121365 scopus 로고
    • Morphological instability of a terrace edge during step-flow growth
    • G. S. Bales and A. Zangwill, Morphological instability of a terrace edge during step-flow growth, Phys. Rev. B, 41 (1990), pp. 5500-5508.
    • (1990) Phys. Rev. B , vol.41 , pp. 5500-5508
    • Bales, G.S.1    Zangwill, A.2
  • 3
    • 0000791278 scopus 로고    scopus 로고
    • Kinetic model for a step edge in epitaxial growth
    • R. E. Caflisch, W. E, M. F. Gyure, B. Merriman, and C. Ratsch, Kinetic model for a step edge in epitaxial growth, Phys. Rev. E, 59 (1999), pp. 6879-6887.
    • (1999) Phys. Rev. E , vol.59 , pp. 6879-6887
    • Caflisch, R.E.1    Gyure, M.F.2    Merriman, B.3    Ratsch, C.4
  • 6
    • 36549101014 scopus 로고
    • Growth kinetics and step density in reflection high-energy electron diffraction during molecular-beam epitaxy
    • S. Clarke and D. Vvedensky, Growth kinetics and step density in reflection high-energy electron diffraction during molecular-beam epitaxy, J. Appl. Phys., 63 (1988), pp. 2272- 2283.
    • (1988) J. Appl. Phys , vol.63 , pp. 2272-2283
    • Clarke, S.1    Vvedensky, D.2
  • 7
    • 36849110552 scopus 로고
    • Atomic view of surface diffusion: Tungsten on tungsten
    • G. Ehrlich and F. G. Hudda, Atomic view of surface diffusion: Tungsten on tungsten, J. Chem. Phys., 44 (1966), pp. 1039-1099.
    • (1966) J. Chem. Phys , vol.44 , pp. 1039-1099
    • Ehrlich, G.1    Hudda, F.G.2
  • 8
    • 0041656569 scopus 로고
    • The stability of growing or evaporating crystals
    • R. Ghez, H. G. Cohen, and J. B. Keller, The stability of growing or evaporating crystals, J. Appl. Phys., 73 (1993), pp. 3685-3693.
    • (1993) J. Appl. Phys , vol.73 , pp. 3685-3693
    • Ghez, R.1    Cohen, H.G.2    Keller, J.B.3
  • 9
    • 0024107153 scopus 로고
    • The kinetics of fast steps on crystal surfaces and its application to the molecular beam epitaxy of silicon
    • R. Ghez and S. S. Iyer, The kinetics of fast steps on crystal surfaces and its application to the molecular beam epitaxy of silicon, IBM J. Res. Develop., 32 (1988), pp. 804-818.
    • (1988) IBM J. Res. Develop , vol.32 , pp. 804-818
    • Ghez, R.1    Iyer, S.S.2
  • 11
    • 4243351883 scopus 로고
    • Competition between noise and determinism in step flow growth
    • A. Karma and C. Misbah, Competition between noise and determinism in step flow growth, Phys. Rev. Lett., 71 (1993), pp. 3810-3813.
    • (1993) Phys. Rev. Lett , vol.71 , pp. 3810-3813
    • Karma, A.1    Misbah, C.2
  • 12
    • 1442332741 scopus 로고
    • The stability of rapidly growing crystals
    • J. B. Keller, H. G. Cohen, and G. J. Merchant, The stability of rapidly growing crystals, J. Appl. Phys., 73 (1993), pp. 3694-3697.
    • (1993) J. Appl. Phys , vol.73 , pp. 3694-3697
    • Keller, J.B.1    Cohen, H.G.2    Merchant, G.J.3
  • 13
    • 0001542432 scopus 로고    scopus 로고
    • Stability and kinetics of step motion on crystal surfaces
    • F. Liu and H. Metiu, Stability and kinetics of step motion on crystal surfaces, Phys. Rev. E, 49 (1997), pp. 2601-2616.
    • (1997) Phys. Rev. E , vol.49 , pp. 2601-2616
    • Liu, F.1    Metiu, H.2
  • 14
    • 0012245380 scopus 로고    scopus 로고
    • Level set methods with applications to island dynamics
    • I. Athanasopoulos, G. Makrakis, and J. F. Rodrigues, eds. Chapman and Hall/CRC, Boca Raton, FL
    • B. Merriman, R. E. Caflisch, and S. Osher, Level set methods with applications to island dynamics, in Free Boundary Problems: Theory and Applications, I. Athanasopoulos, G. Makrakis, and J. F. Rodrigues, eds., Chapman and Hall/CRC, Boca Raton, FL, 1999, pp. 51-70.
    • (1999) Free Boundary Problems: Theory and Applications , pp. 51-70
    • Merriman, B.1    Caflisch, R.E.2    Osher, S.3
  • 15
    • 36849117884 scopus 로고
    • Morphological stability of a particle growing by diffusion or heat flow
    • W. W. Mullins and R. F. Sekerka, Morphological stability of a particle growing by diffusion or heat flow, J. Appl. Phys., 34 (1963), pp. 323-329.
    • (1963) J. Appl. Phys , vol.34 , pp. 323-329
    • Mullins, W.W.1    Sekerka, R.F.2
  • 16
    • 36849120852 scopus 로고
    • Stability of a planar interface during solidification of a dilute binary alloy
    • W. W. Mullins and R. F. Sekerka, Stability of a planar interface during solidification of a dilute binary alloy, J. Appl. Phys., 35 (1964), pp. 444-451.
    • (1964) J. Appl. Phys , vol.35 , pp. 444-451
    • Mullins, W.W.1    Sekerka, R.F.2
  • 17
    • 39249083669 scopus 로고    scopus 로고
    • Continuum model for low temperature relaxation of crystal shapes
    • O. Pierre-Louis, Continuum model for low temperature relaxation of crystal shapes, Phys. Rev. Lett., 87 (2001), pp. 106104/1-4.
    • (2001) Phys. Rev. Lett , vol.87 , Issue.1-4 , pp. 106104
    • Pierre-Louis, O.1
  • 19
    • 0002489522 scopus 로고    scopus 로고
    • Instabilities in crystal growth by atomic or molecular beams
    • P. Politi, G. Grenet, A. Marty, A. Ponchet, and J. Villain, Instabilities in crystal growth by atomic or molecular beams, Phys. Rep., 324 (2000), pp. 271-404.
    • (2000) Phys. Rep , vol.324 , pp. 271-404
    • Politi, P.1    Grenet, G.2    Marty, A.3    Ponchet, A.4    Villain, J.5
  • 20
    • 0001609410 scopus 로고    scopus 로고
    • Ehrlich-Schwoebel instability in molecular-beam epitaxy: A minimal model
    • P. Politi and J. Villain, Ehrlich-Schwoebel instability in molecular-beam epitaxy: A minimal model, Phys. Rev. B, 54 (1996), pp. 5114-5129.
    • (1996) Phys. Rev. B , vol.54 , pp. 5114-5129
    • Politi, P.1    Villain, J.2
  • 21
    • 0014464613 scopus 로고
    • Step motion on crystal surfaces II
    • R. L. Schwoebel, Step motion on crystal surfaces II, J. Appl. Phys., 40 (1969), pp. 614-618.
    • (1969) J. Appl. Phys. , Issue.40 , pp. 614-618
    • Schwoebel, R.L.1
  • 22
    • 36749047341 scopus 로고
    • Step motion on crystal surfaces
    • R. L. Schwoebel and E. J. Shipsey, Step motion on crystal surfaces, J. Appl. Phys., 37 (1966), pp. 3682-3686.
    • (1966) J. Appl. Phys. , vol.37 , pp. 3682-3686
    • Schwoebel, R.L.1    Shipsey, E.J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.