Low dielectric constant porous diamond films formed by diamond nanoparticles

Applied Physics Letters

Volumn 83, Issue 11, 2003, Pages 2226-2228

  Sakaue, Hiroyuki ^a   Yoshimura, Noriyoshi ^a   Shingubara, Shoso ^a   Takahagi, Takayuki ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

NANOSTRUCTURED MATERIALS; PERMITTIVITY; POROUS MATERIALS; THERMODYNAMIC STABILITY;

DIAMOND NANOPARTICLES;

DIAMOND FILMS;

EID: 0142089979     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1609659     Document Type: Article

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