Megasonic cleaning, cavitation, and substrate damage: An atomistic approach

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6283 II, Issue , 2006, Pages

  Kapila, Vivek ^a   Deymier, Pierre A ^a   Shende, Hrishikesh ^a   Pandit, Viraj ^a   Raghavan, Srini ^a   Eschbach, Florence O ^b  

^a University of Arizona   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

Cavitation; Megasonics; Photomask cleaning

Indexed keywords

MEGASONICS; PHOTOMASK CLEANING; TWO-DIMENSIONAL ATOMISTIC MODEL;

ACOUSTIC STREAMING; CAVITATION; OPTICAL PROPERTIES;

PHOTOLITHOGRAPHY;

EID: 33748052363     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.681771     Document Type: Conference Paper

References (12)

1. G. Stix, "Getting more from moore's," Scientific American 284, p. 32, 2001.
2. A. A. Busnaina, I. I. Kashkoush, and G. W. Gale, "An experimental-study of megasonic cleaning of silicon-wafers," J. Electrochem. Soc. 142, p. 2812, 1995.
3. R. Resnick and D. Halliday, Physics, Wiley, NewYork, 1990.
4. D. Zhang, Fundamental study of megasonic cleaning. PhD thesis, University of Minnesota, 1993.
5. W. L. Nyborg, "Acoustic streaming," in Physical Acoustics - Vol. II B, W. P. Mason, ed., pp. 265-331, Academic, London, 1965.
6. F. R. Young, Cavitation, McGraw-Hill, London, 1989.
7. H. Schlichting, Boundary-Layer Theory, McGraw-Hill, NewYork, 1968.
8. V. Kapila, P. A. Deymier, H. Shende, V. Pandit, S. Raghavan, and F. O. Eschbach, "Acoustic streaming effects in megasonic cleaning of euv photomasks: A continuum model," in 25th Annual BACUS Symposium on Photomask Technology, J. T. Weed and P. M. Martin, eds., Proc. SPIE 5992, pp. 59923X-1, 2005.
9. F. Holsteyns, A. Riskin, G. Vereecke, A. Maes, and P. M. Mertens Electrochemical Society PV-26, 2003.
10. A. Hand, "Damage free cleaning beyond 6.5 nm," Semiconductor International Jan. 2005.
11. F. Holsteyns, K. Lee, S. Graf, R. Palmans, G. Vereecke, and P. W. Mertens, "Megasonics: A cavitation driven process," Solid State Phenomena 103-104, 2005.
12. M. Allen and D. Tildesley, Computer Simulation of Liquids, Clarendon Press, Oxford, 1987.