Reduction of the acquisition time for CMOS time-resolved photon emission by optimized IR detection

Microelectronics Reliability

Volumn 46, Issue 9-11, 2006, Pages 1504-1507

  Ispasoiu, Radu ^a   Crawford, Tom ^a   Johnston, Brian ^a   Shaw, Chris ^a   Kasapi, Steven ^a   Goertz, Jason ^b   Rinaudo, Olivier ^b   Ouimet, Peter ^b  

^a Credence Systems Corporation   (United States)

^b FREESCALE SEMICONDUCTOR INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED RADIATION; OPTIMIZATION; PHOTONS; PROBES; TIMING CIRCUITS; TIMING JITTER;

ACQUISITION TIME; DARK-COUNT RATE; PHOTON DETECTION; TIME RESOLVED PHOTON EMISSION (TRE);

CMOS INTEGRATED CIRCUITS;

EID: 33747776420     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2006.07.026     Document Type: Article

References (7)

1. Bodoh D., et al. Defect localization using time-resolved photon emission on SOI devices that fail scan tests. Proc ISTFA (2002) 655
2. Ouimet P., et al. Analysis of 0.13um CMOS technology using time resolved light emission. Proc ISTFA (2004) 203
3. Polonsky S. Time-resolved emission spectroscopy of silicon integrated circuits. American Physical Society News, October 2005; online: http://www.aps.org/apsnews/1005/100515.cfm.
4. Vickers J.S., et al. Time-resolved photon-counting system based on a Geiger-mode InGaAs/InP APD and a solid immersion lens. Proc IEEE LEOS 2 (2003) 600
5. Wampler R et al. Dramatic Reduction in Optical Probing Time Via Compression of ATPG-Generated Test Loops, submitted to ITC 2006.
6. Sze S.M. Physics of semiconductor devices (1981), Wiley, New York
7. Ispasoiu R et al. Time-resolved photon counting with Geiger mode avalanche photodiodes for CMOS activity debug. Single-Photon Workshop-2005, Teddington, UK.