Copper micromoulding process for NMR microinductors realization

Sensors and Actuators, A: Physical

Volumn 99, Issue 1-2, 2002, Pages 49-54

  Coutrot, A L ^a,c   Dufour Gergam, E ^a   Quemper, J M ^a   Martincic, E ^a   Gilles, J P ^a   Grandchamp, J P ^b   Matlosz, M ^b   Sanchez, A ^b   Darasse, L ^a   Ginefri, J C ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b UNIVERSITÉ DE LORRAINE   (France)

^c Tel: +33 1 69 15 42 10 ^*  (France)

Author keywords

Copper micromoulding; Gray tone lithography; NMR imaging

Indexed keywords

COPPER MICROMOULDING; MICROINDUCTORS;

COPPER; CURRENT DENSITY; ELECTRIC INDUCTORS; LITHOGRAPHY; MAGNETIC RESONANCE IMAGING; MASKS; NATURAL FREQUENCIES; NUCLEAR MAGNETIC RESONANCE;

MICROSENSORS;

EID: 0037197291     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00897-4     Document Type: Conference Paper

References (8)

1. Eurosensors XI