A MEMS-Based Correlation Radiometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5346, Issue , 2004, Pages 37-47

  Sinclair, Michael B ^a   Pfeifer, Kent B ^a   Butler, Michael A ^b   Senturia, Stephen D ^b   Deutsch, Erik R ^b   Youngner, Dan ^c   Cabuz, Eugen ^c   Hocker, G Benjamin ^c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Polychromix Inc   (United States)

^c HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION RADIOMETRY; DARK-FIELD CORRELATION SENSING (DFCS); POLYCHROMATORS; TRANSMISSION SPECTRUM;

CORRELATION METHODS; DIFFRACTION GRATINGS; LIGHT ABSORPTION; LIGHT INTERFERENCE; LIGHT REFLECTION; LIGHT TRANSMISSION; OPTIMIZATION; RADIOMETERS; SCANNING ELECTRON MICROSCOPY; TRANSFER FUNCTIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 2142732436     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.536306     Document Type: Conference Paper

References (11)

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