A large-Travel vertical planar actuator with improved stability

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 352-355

  Deutsch, E R ^a   Bardhan, J P ^b   Senturia, S D ^a,b   Hocker, G B ^c   Youngner, D W ^c   Sinclair, M B ^d   Butler, M A ^a  

^a Polychromix Inc   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c HONEYWELL   (United States)

^d SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Actuators; Diffraction gratings; Electrodes; Holographic optical components; Laboratories; Robustness; Springs; Stability; Tensile stress; Voltage

Indexed keywords

ACTUATORS; CONVERGENCE OF NUMERICAL METHODS; DIFFRACTION; DIFFRACTION GRATINGS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATIC ACTUATORS; LABORATORIES; MICROSYSTEMS; ROBUSTNESS (CONTROL SYSTEMS); SPRINGS (COMPONENTS); TENSILE STRESS; TRANSDUCERS;

ACTUATION VOLTAGES; HOLOGRAPHIC OPTICAL COMPONENTS; LARGE TRAVEL; MIDINFRARED; NON-LINEAR SPRINGS; PLANAR ACTUATORS; STRESS MANAGEMENT; STRESS STIFFENING;

SOLID-STATE SENSORS;

EID: 84867980716     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215326     Document Type: Conference Paper

References (5)

1. G.B. Hocker, D. Youngner, E. Deutsch, A. Volpicelli, S. Senturia, M. Butler, M. Sinclair, T. Plowman, A. J. Ricco, "The Polychromator: A MEMS Diffraction Grating for Synthetic Spectra," Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 4-8, 2000, pp. 89-91.
2. M. B. Sinclair, M. A. Butler, A. J. Ricco and S. D. Senturia, "Synthetic Spectra: A Tool for Correlation Spectroscopy," Applied Optics, 36, 3342 (1997).
3. E. S. Hung and S. D. Senturia, "Extending the Travel Range of Analog-Tuned Electrostatic Actuators," Journal of Microelectro-mechanical Systems, vol. 8, 1999, pp. 497.
4. E. R. Deutsch, "Achieving Large Stable Vertical Displacement in Surface-Micromachined Microelectromechanical Systems (MEMS)," Ph. D. Thesis, MIT, June 2002.
5. J. P. Bardhan, "Calibration of a Microvision System for MEMS Device Characterization," M. Eng. Thesis, MIT, June 2001.