Composite SiOx/hydrocarbon plasma polymer films prepared by RF magnetron sputtering of SiO2 and polyethylene or polypropylene

Vacuum

Volumn 81, Issue 1, 2006, Pages 32-37

  Pihosh, Y ^a   Biederman, H ^a   Slavinska, D ^a   Kousal, J ^a   Choukourov, A ^a,b   Trchova, M ^a   Mackova, A ^c   Boldyreva, A ^c  

^a CHARLES UNIVERSITY   (Czech Republic)

^b NAGOYA UNIVERSITY   (Japan)

^c NUCLEAR PHYSICS INSTITUTE   (Czech Republic)

Author keywords

Composite films; Magnetron; Polyethylene; Polypropylene; Sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; POLYETHYLENES; POLYPROPYLENES; SILICA;

COMPOSITE FILMS; HYDROCARBON PLASMAS; PLASMA POLYMER FILMS; POLYMER FILMS;

PLASTIC FILMS;

EID: 33747452820     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.02.006     Document Type: Article

References (15)

1. Biederman H., and Martinů L. Plasma polymer-metal composite films. In: d'Agostino R. (Ed). Plasma deposition, treatment and etching of polymers (1990), Academic Press, Boston 269
2. Biederman H., and Osada Y. Plasma polymerization procesess (1992), Elsevier, Amsterdam
3. Biederman H., and Holland L. Nucl Instr Methods 212 (1983) 49
4. Banks A, Rutledge SK, Dever JA, Hambourger PD, Walters P, Bruckner EJ. In: 39th Annual Technical Conference. SVC Paper 83, 1996; p. 431.
5. Hozumi A., Sekoguchi H., Kakinoki N., and Takai O. J Mater Sci 32 (1997) 4253
6. Shirafuji T., Miyazaki Y., Hayashi Y., and Nishino S. Plasmas Polymers 4 (1999) 57
7. Choukourov A., Pihosh Y., Stelmashuk V., Biederman H., Slavinska D., Kormunda M., and Zajickova L. Surf Coat Tech 151 (2002) 214
8. Michler T., Grischke M., Bewilologua K., and Hieke A. Surf Coat Technol 11 (1999) 41
9. Franclová J., Kučerová V., Buršíková V., Zajíčková L., and Peřina V. Czech J Phys 54 (2004) 847
10. Pihosh Y, Biederman H, Slavinska D, Kousal J, Choukourov A, Trchova M, Mackova A, Boldyreva A, Vacuum 2006, in print.
11. http://www.chem.uni-potsdam.de/tools/
12. Kholodkov I., Biederman H., Slavinska D., Choukourov A., and Trchova M. Vacuum 70 (2003) 505
13. Trchová M., Zemek J., and Jurek K. J Appl Phys 82 (1997) 3519
14. Modreanu M., Gartner M., Aperathitis E., Tomozeiu N., Androulidaki M., Cristea D., and Hurley P. Physica E 16 (2003) 461
15. Yang C.S., Oh K.S., Choi C.K., Lee H.J., and Lee K.M. J Korean Phys Soc 44 (2004) 1102