Rf sputtering of composite SiOx/plasma polymer films and their basic properties

Surface and Coatings Technology

Volumn 151-152, Issue , 2002, Pages 214-217

  Choukourov, A ^a   Pihosh, Y ^a   Stelmashuk, V ^a   Biederman, H ^a   Slavinska D ^a   Kormunda, M ^b   Zajickova L ^c  

^a CHARLES UNIVERSITY   (Czech Republic)

^b UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

^c MASARYK UNIVERSITY   (Czech Republic)

Author keywords

Composite films; Magnetron; Rf sputtering

Indexed keywords

FLUOROCARBONS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; PLASMAS; PLASTIC FILMS; POLYMERS; REFRACTIVE INDEX; SILICA; X RAY PHOTOELECTRON SPECTROSCOPY;

RUTHERFORD SPUTTERING;

COMPOSITE MATERIALS;

COMPOSITE; FILM; POLYMER; SILICON DIOXIDE; SPUTTERING;

EID: 0036495623     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01622-X     Document Type: Article

References (6)