Modeling and performance of a magnetic MEMS wiping actuator

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 904-911

  Gray Jr , Gary D ^a,b   Kohl, Paul A ^a  

^a Georgia Institute of Technology   (United States)

^b SHELL OIL COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FERROMAGNETIC PERMALLOY; MAGNETIC ACTUATOR MICROSWITCH; SELF-WIPING ACTION;

ACTUATORS; FERROMAGNETIC MATERIALS; LITHOGRAPHY; MICROELECTRONIC PROCESSING; SEMICONDUCTOR DEVICE MANUFACTURE; SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 33747447702     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.876787     Document Type: Article

References (12)

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