Organic-inorganic hybrid materials for UV-nanoimprint lithography

Journal of Photopolymer Science and Technology

Volumn 19, Issue 3, 2006, Pages 397-402

  Katayama, Junko ^a   Yamaki, Shigeru ^a   Mitsuyama, Masahiro ^a   Hanabata, Makoto ^a  

^a Kyoto Research Park   (Japan)

Author keywords

Monomer substitution; Nanoparticles; Organic inorganic hybrid materials; Silicasol; UV NIL

Indexed keywords

EID: 33747424755     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.19.397     Document Type: Article

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