Atomic force microscopic characterization of films grown by inverse pulsed laser deposition

Applied Surface Science

Volumn 252, Issue 13 SPEC. ISS., 2006, Pages 4661-4666

  Egerhazi L ^a   Geretovszky, Zs ^a   Csako T ^a   Szorenyi T ^a  

^a UNIVERSITY OF SZEGED   (Hungary)

Author keywords

Atomic force microscopic characterization; Carbon nitride films; Film nanostructure; Particulates; Pulsed laser deposition

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NITRIDE; GRAPHITE; PULSED LASER DEPOSITION; SURFACE ROUGHNESS;

ATOMIC FORCE MICROSCOPIC CHARACTERIZATION; CARBON NITRIDE FILMS; ELLIPTICAL THICKNESS DISTRIBUTION; FILM NANOSTRUCTURE; PARTICULATES;

FILM GROWTH;

EID: 33747398957     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.07.083     Document Type: Article

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