Deposition of photocatalytic TiO2 layers by pulse magnetron sputtering and by plasma-activated evaporation

Vacuum

Volumn 80, Issue 7 SPEC. ISS., 2006, Pages 679-683

  Frach, P ^a   Gloß D ^a   Metzner, Chr ^a   Modes, T ^a   Scheffel, B ^a   Zywitzki, O ^a  

^a Fraunhofer Institute for Electron Beam and Plasma Technology   (Germany)

Author keywords

Low temperature deposition; Photocatalysis; Plasma activated reactive evaporation; Pulse magnetron sputtering; Reactive sputtering; Titanium dioxide

Indexed keywords

CONTACT ANGLE; ELECTRON BEAMS; MAGNETRON SPUTTERING; PHOTOCATALYSIS; PHYSICAL VAPOR DEPOSITION; THIN FILMS;

LOW-TEMPERATURE DEPOSITION; PLASMA-ACTIVATED REACTIVE EVAPORATION; PULSE MAGNETRON SPUTTERING; REACTIVE SPUTTERING;

TITANIUM DIOXIDE;

EID: 33747396843     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.11.001     Document Type: Article

References (17)

1. Ohno S., Sato D., Kon M., Song P.K., Yoshikawa M., Suzuki K., et al. Thin Solid Films 445 (2003) 207
2. Miyagi T., Kamei M., Ogawa T., Mitsuhashi T., Yamazaki A., and Sato T. Thin Solid Films 442 (2003) 32
3. Zakrzewska K., Brudnik A., Radecka M., and Posadowski W. Thin Solid Films 343-344 (1999) 152
4. Frach P., Glöß D., Goedicke K., Fahland M., and Gnehr W.-M. Thin Solid Films 445 (2003) 251
5. Frach P., Goedicke K., Gottfried C., and Bartzsch H. Surf Coat Technol 142-144 (2001) 628
6. Modes T., Scheffel B., Metzner C., Zywitzki O., and Reinhold E. Surf Coat Technol 200 (2005) 306
7. Spurr R., and Myers H. Anal Chem 29 5 (1957) 760
8. Bartzsch H., Frach P., and Goedicke K. Surf Coat Technol 132 (2000) 244
9. Bartzsch H. Thesis, Fakultät für Naturwissenschaften, Otto-von-Guericke-Universität Magdeburg, 2000.
10. Zywitzki O., Modes T., Sahm H., Frach P., Goedicke K., and Glöß D. Surf Coat Technol 180-181 (2004) 538
11. Goedicke K., Scheffel B., and Schiller S. Surf Coat Technol 68-69 (1994) 799
12. Metzner C., Scheffel B., and Goedicke K. Surf Coat Technol 86-87 (1996) 769
13. Löbl P., Huppertz M., and Mergel D. Thin Solid Films 251 (1994) 72
14. Hass G. Vacuum 2 4 (1952) 331
15. 2 Photocatalysis (1999), BKC, Tokyo
16. Wang R., Hashimoto K., and Fujishima A. Adv Mater 10 2 (1998) 135
17. Wang R., Sakai N., Fujishima A., Watanabe T., and Hashimoto K. J Phys Chem B 103 (1999) 2188