Femtosecond laser beam in interaction with materials for thin film deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6261 II, Issue , 2006, Pages

  Boulmer Leborgne, Chantal ^a   Benzerga, Ratiba ^a   Scuderi, Deborah ^c   Perrière, Jacques ^b   Albert, Olivier ^c   Etchepare, Jean ^c   Millon, Eric ^d  

^a UNIVERSITÉ D'ORLÉANS   (France)

^b INSTITUT DES NANOSCIENCES DE PARIS   (France)

^c LABORATOIRE D OPTIQUE APPLIQUÉE   (France)

^d UNIVERSITÉ DE LORRAINE   (France)

Author keywords

Cluster; Droplets; Femtosecond laser; Laser ablation; Laser material interaction; PLD; Thin film deposition

Indexed keywords

DEPOSITION; FILM GROWTH; LASER ABLATION; PULSED LASER DEPOSITION; SENSORS; THERMAL EFFECTS;

CLUSTER; DROPLETS; FEMTOSECOND LASER; LASER-MATERIAL INTERACTION; THIN FILM DEPOSITION;

THIN FILMS;

EID: 33747359661     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.669256     Document Type: Conference Paper

References (17)

1. Pulsed laser deposition of thin films edited by D B Chrisey and G K Hubler, Wiley, New York, 1994
2. R K Singh, D Bhattacharya and J Narayan, Appl Phys Lett 57, 2022, 1990
3. V Craciun, D.Craciun, J.Perrière and I W Boyd J Appl Phys 85, 3310, 1999
4. EG Gamaly, A V Rode, V T Tikhonchuk, B Luther-Davies Appl Surf Sci 197-198, 699, 2002
5. F Costache, J Reif Thin solid films 453-454, 334, 2004
6. S Valette, R Le Harzic, N Huot, E Audouard, R Fortunier Appl Surf Se 247, 238, 2005
7. S Amoruso, R Bruzzese, N Spinelli, R Velotta, M Vitiello, X Wang, G Ausanio, V lanotti, L Lanotte Appl Phys Lett 84 no 22, 4502, 2004
8. E.G.Gamaly, A.V.Rode, O.Uteza, V.Kolev, B.Luther-Davies, T.Bauer, J.Koch, F.Korte and B.N.Chichkov, J.Appl.Phys. 95-5, 2250, 2004
9. R.Teghil, L.d'Alessio, A.Santagata, M.Zaccagnino, D.Ferro and D.J.Sordelet, Appl.Surf.Sci. 210, 307, 2003
10. R.Stoian, H.Varel, A.Rosenfeld, D.Ashkenasi, R.Kelly and E.E.Campbell, Appl.Surf.Sci. 165, 44, 2000
11. R.Stoian, H.Varel, A.Rosenfeld, D.Ashkenasi, R.Kelly and E.E.Campbell, Nuclear Instruments and Methods in Physics Research B, 166, 682, 2000
12. O.Albert, S.Roger, Y.Glinec, J.C.Loulergue, J.Etchepare, C.Boulmer-Leborgne, J.Perrière and E.Millon, Applied Physics A, 76, 319, 2003
13. F.Costache and J.Reif, Thin Solid Films, 453-454, 334, 2004
14. J.Perrière, E.Millon, W.Seiler, C.Boulmer-Leborgne, V.Craciun, O.Albert, J.C.Loulergue and J.Etchepare, J.Appl.Phys. 91-2, 690, 2002
15. Wm.T.Ashurst, Phys.Rev.Lett. 59-6, 6742, 1999
16. E.Millon, O.Albert, J.Etchepare, J.Perrière, R.M.Defourneau, D. Defourneau, Applied Physics A-77, 73, 2003
17. T.W.Trelenberg, L.N.Dinh, C.K.Saw, B.C.Stuart andM.Balooch, Appl.Surf.Sci., 221, 364, 2004