Dynamics of particle ejection in dry laser cleaning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6261 I, Issue , 2006, Pages

  Grojo, David ^a   Cros, Alain ^a   Delaporte, Philippe ^a   Sentis, Marc ^a  

^a CNRS   (France)

Author keywords

Forward scattering detection; Laser cleaning; Particle ejection; Particle removal

Indexed keywords

IRRADIATION; LASER APPLICATIONS; LASER PULSES; NANOTECHNOLOGY; SCATTERING; SILICON;

FORWARD SCATTERING DETECTION; LASER CLEANING; PARTICLE EJECTION; PARTICLE REMOVAL;

DRY CLEANING;

EID: 33747339214     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.674578     Document Type: Conference Paper

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