Different optical conductivity enhancement (OCE) protocols to eliminate charging during ultra low energy SIMS profiling of semiconductor and semi-insulating materials

Applied Surface Science

Volumn 252, Issue 19, 2006, Pages 7221-7223

  Morris, R J H ^a   Dowsett, M G ^a   Chang, R J H ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

Charge compensation; Semi insulators; Semiconductors; Ultra low energy SIMS

Indexed keywords

INSULATING MATERIALS; ION BEAMS; ION BOMBARDMENT; LASER BEAM EFFECTS; LIGHT SOURCES; SECONDARY ION MASS SPECTROMETRY;

CHARGE COMPENSATION; ELECTRON HOLE PAIRS; SEMI INSULATORS; ULTRA LOW ENERGY SIMS;

SEMICONDUCTOR MATERIALS;

EID: 33747170300     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.02.143     Document Type: Article

References (15)

1. Appelhans A.D. Int. J. Mass Spectrom. Ion Process. 88 (1989) 161
2. Werner H.W., and Morgan E.A. J. Appl. Phys. 47 4 (1976) 1232
3. Wittmaak K. J. Appl. Phys. 50 1 (1979) 493
4. McPhail D.S., Dowsett M.G., and Parker E.H.C. J. Appl. Phys. 60 7 (1986) 2573
5. Gu C., Garcia R., Pivovarov A., Stevie F., and Griffis D. Appl. Surf. Sci. 231-232 (2004) 663
6. Dowsett M.G., McPhail D.S., Parker E.H.C., and Fox H. Vacuum 36 (1986) 913
7. Seyama H. Appl. Surf. Sci. 203-204 (2003) 745
8. Dowsett M.G., Morris R., Chou P.-F., Corcoran S.F., Kheyrandish H., Cooke G.A., Maul J.L., and Patel S.B. Appl. Surf. Sci. 203-204 (2003) 500-503
9. Wittmaack K., and Homma Y. Appl. Phys. Lett. 58 (1991) 2140
10. Kempf J., Nonnenmacher M., and Wagner H.H. Appl. Phys. A 49 (1989) 279
11. Dowsett M.G., James D.M., Drummond I.W., El Gomati M.M., El Bakush T.A., Street F.J., and Barlow R.D. In: Benninghoven A., Janssen K.T.F., Tumpner J., and Werner H.W. (Eds). Secondary Ion Mass Spectrometry-SIMS VIII (1992), Wiley, Amsterdam 359
12. Drummond I.W., Dowsett M.G., James D.M., and Street F.J. J. Vac. Sci. Technol. A 10 (1992) 2897
13. De Coster W., Brijis B., Osiceanu P., Alay J., Caymax M., and Vandervorst W. Nucl. Inst. Meth. Phys. Res. B 85 (1994) 911
14. Singh J. Semiconductor Devices: An Introduction (1994), McGraw Hill
15. Rokakh A.G., Zhukov A.G., Stetsura S.V., and Serdobintsev A.A. Nucl. Inst. Meth. Phys. Res. B 226 (2004) 595