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Volumn 36, Issue 9, 2006, Pages 973-981
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An electrochemical and in situ SERS study of Cu electrodeposition from acidic sulphate solutions in the presence of 3-diethylamino-7-(4- dimethylaminophenylazo)-5-phenylphenazinium chloride (Janus Green B)
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Author keywords
Copper; Electrodeposition; JGB; SERS; ULSI fabrication
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Indexed keywords
CHARGE TRANSFER;
CHLORIDE MINERALS;
CURRENT DENSITY;
ELECTRODEPOSITION;
NUCLEATION;
RAMAN SPECTROSCOPY;
SULFATE MINERALS;
SURFACE DISCHARGES;
ULSI CIRCUITS;
CYCLIC VOLTAMMOGRAMS;
JGB;
POTENTIOSTATIC POLARISATION;
SERS;
COPPER METALLURGY;
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EID: 33747168493
PISSN: 0021891X
EISSN: None
Source Type: Journal
DOI: 10.1007/s10800-006-9124-0 Document Type: Article |
Times cited : (55)
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References (20)
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