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Volumn 50, Issue 7-8, 2006, Pages 1175-1177

In0.75Ga0.25As channel layers with record mobility exceeding 12,000 cm2/Vs for use in high-κ dielectric NMOSFETs

Author keywords

Charge carrier mobility; Compound semiconductor; High dielectrics; MOSFETs

Indexed keywords


EID: 33747157624     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2006.05.017     Document Type: Letter
Times cited : (17)

References (9)
  • 1
    • 20344385571 scopus 로고    scopus 로고
    • Chau R. Benchmarking nanotechnology for high-performance and low-power transistor applications. In: Proceedings of the 4th IEEE conference on nanotechnology, 2004. p. 3-6.
  • 2
    • 21744442652 scopus 로고    scopus 로고
    • Ashley T, Barnes AR, Buckle L, Datta S, Dean AB, Emeny MT. Novel InSb-based quantum well transistors for ultra-high speed, low power logic applications. In: 7th International conference on solid-state and integrated-circuit technology, 2004. p. P2253-P56.
  • 4
    • 33747197908 scopus 로고    scopus 로고
    • Rajagopalan K, Abrokwah J, Droopad R, Passlack M. Enhancement mode GaAs n-Channel MOSFET, IEEE Electron Dev Lett, submitted for publication.
  • 5
    • 31144469815 scopus 로고    scopus 로고
    • 3 dielectric stacks on GaAs
    • 3 dielectric stacks on GaAs. J Vac Sci Technol B 23 (2005) 1773-1781
    • (2005) J Vac Sci Technol B , vol.23 , pp. 1773-1781
    • Passlack, M.1
  • 6
    • 0142020894 scopus 로고    scopus 로고
    • Scanning tunneling microscopy and spectroscopy of gallium oxide deposition and oxidation on GaAs(0 0 1)-c(2 × 8)/(2 × 4)
    • Hale M., Yi S.I., Sexton J.Z., Kummel A.C., and Passlack M. Scanning tunneling microscopy and spectroscopy of gallium oxide deposition and oxidation on GaAs(0 0 1)-c(2 × 8)/(2 × 4). J Chem Phys 119 (2003) 6719-6728
    • (2003) J Chem Phys , vol.119 , pp. 6719-6728
    • Hale, M.1    Yi, S.I.2    Sexton, J.Z.3    Kummel, A.C.4    Passlack, M.5
  • 7
    • 33747197611 scopus 로고    scopus 로고
    • Passlack M, Hartin O, Ray M, Medendorp N. US Patent 6,963,090, November 8, 2005.
  • 9
    • 0742321656 scopus 로고    scopus 로고
    • Mobility measurement and degradation mechanism of MOSFETs made with ultrathin high-κ dielectrics
    • Zhu W., Han J.-P., and Ma T.P. Mobility measurement and degradation mechanism of MOSFETs made with ultrathin high-κ dielectrics. IEEE Trans Electron Dev 51 (2004) 98-105
    • (2004) IEEE Trans Electron Dev , vol.51 , pp. 98-105
    • Zhu, W.1    Han, J.-P.2    Ma, T.P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.