Transparent amorphous conductive Cd-In-Sb-O thin films for flexible devices

Vacuum

Volumn 80, Issue 9, 2006, Pages 1038-1041

  Tetsuka, Hiroyuki ^a   Jin Shan, Yue ^a   Tezuka, Keitaro ^a   Imoto, Hideo ^a  

^a UTSUNOMIYA UNIVERSITY   (Japan)

Author keywords

Amorphous; FET; rf sputtering; Transparent conductor

Indexed keywords

AMORPHOUS MATERIALS; CADMIUM COMPOUNDS; CARRIER CONCENTRATION; FIELD EFFECT TRANSISTORS; HALL EFFECT; POLYETHYLENES; SPUTTERING;

FIELD-EFFECT MOBILITY; RF-SPUTTERING; ROOM TEMPERATURE; TRANSPARENT CONDUCTOR;

THIN FILMS;

EID: 33747062795     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.11.066     Document Type: Article

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