High voltage breakdown in an inductively coupled ion source

Journal of Physics D: Applied Physics

Volumn 39, Issue 16, 2006, Pages 3588-3595

  Aanesland, A ^a   Boswell, R W ^a   Smith, N ^b  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; DC MOTORS; ELECTRIC POTENTIAL; ION BEAMS; NATURAL FREQUENCIES; THERMAL EFFECTS;

HIGH VOLTAGE BREAKDOWN; INDUCTIVELY COUPLED ION SOURCES; NEGATIVE BARRIER CORONA; RADIO FREQUENCY (RF) ANTENNA;

INDUCTIVELY COUPLED PLASMA;

EID: 33746866761     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/16/010     Document Type: Article

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