Comparison between experiment and two simulation strategies for the extraction of focused ion beams

Review of Scientific Instruments

Volumn 75, Issue 7, 2004, Pages 2379-2386

  Sutherland, Orson ^a   Keller, John ^a   Irzyk, Michael ^a   Boswell, Rod ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; CURRENT DENSITY; DATA REDUCTION; ELECTRIC POTENTIAL; ELECTRODES; ERROR ANALYSIS; INTERFACES (MATERIALS); OSCILLATIONS; PLASMA DENSITY; PLASMA SHEATHS; PLASMA SOURCES; RAY TRACING;

FOCUSED ION BEAMS (FIB); HIGH DENSITY PLASMAS (HDP); PARTICLE-IN-CELL (PIC) SIMULATION; PLASMA APERTURE;

ION BEAMS;

EID: 3843100287     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1753669     Document Type: Article

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