Development of a UHV compatible hollow cathode arc source for the deposition of hard nitride coatings

Plasma Sources Science and Technology

Volumn 9, Issue 1, 2000, Pages 25-31

  Isfort, D ^a   Buck, V ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; CERAMIC COATINGS; CUBIC BORON NITRIDE; ELECTRIC ARCS; HEAT CONDUCTION; HEAT RADIATION; MASS SPECTROMETRY; PLASMA PROBES; PROTECTIVE COATINGS; TEMPERATURE DISTRIBUTION; TITANIUM NITRIDE; VACUUM DEPOSITED COATINGS;

HARD COATINGS; HOLLOW CATHODE ARC SOURCES; LANGMUIR PROBES;

PLASMA SOURCES;

EID: 0033887528     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/1/305     Document Type: Article

References (18)

1. Schütze A, Bewilogua K, Luthje H and Koupsidis S 1996 Diamond Relat. Mater. 5 1130-5
2. Barth K-L, Neuffer A, Ulmer J and Lunk A 1996 Diamond Relat. Mater. 5 1270-4
3. Stiegler J, Läufer S, Mainz B, Weber T and Schaarschmidt G 1994 Diamond Relat. Mater. 3 1235
4. Vogels J M M J, Konings L U E and Schram D C 1985 Z. Naturf. 41 585-600
5. Delcroix J L and Trindade AR 1974 Adv. Electron. Electron Phys. 35 (New York: Academic) pp 87-185
6. Nesmeyanov A N 1963 Vapour Pressure of the Chemical Elements (Amsterdam: Elsevier)
7. Ferreira C M and Delcroix J L 1978 J. Appl. Phys. 49 2380-95
8. Incropera F P and de Witt D P 1990 Fund. of Mass and Heat Transfer (New York: Wiley) ch 4.4
9. Siegel R and Howell J R 1981 Thermal Radiation Heat Transfer (London: McGraw-Hill) p 257
10. Neumann W 1987 Ergebnisse der Plasmaphysik u. der Gaselektronik Band 8-The Mechanism of the Thermoemitting Arc Cathode (Berlin: Akademie Verlag) p 20-3
11. Märk T D and Dunn G H 1985 Electron Impact Ionization (New York: Springer) p 166
12. Märk T D and Dunn G H 1985 Electron Impact Ionization (New York: Springer) p 168
13. Berrington K A, Burke P G and Kingston A E 1965 J. Chem. Phys. 43 1464
14. Mitchel JBA 1990 Phys. Rep. 186 215
15. Schlumbohm H 1969 Z. Naturf. 24a 1720-4
16. Schmeltekopf A L and Fehsenfeld F C 1970 J. Chem. Phys. 53 3173-77
17. Guyon P M, Govers T R and Baer T 1986 Z. Phys. D-Atoms, Mol. and Clusters 4 89
18. Schlumbohm H 1969 Z. Naturf. 24a 1716-20