Magnetron-sputtered hard material coatings on thermoplastic polymers for clean room applications

Surface and Coatings Technology

Volumn 108-109, Issue , 1998, Pages 398-402

  Lugscheider, E ^b   Barwulf S ^b   Barimani, C ^b   Riester, M ^a   Hilgers, H ^a  

^a IBM   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Clean room; Coated thermoplastics; Magnetron sputter ion plating; Particle generation

Indexed keywords

ADHESION; CLEAN ROOMS; COATED MATERIALS; CRYSTAL MICROSTRUCTURE; MAGNETRON SPUTTERING; PLASMA APPLICATIONS; POLYAMIDES; POLYCARBONATES; POLYESTERS; SPUTTER DEPOSITION; THERMAL STRESS; TITANIUM NITRIDE;

HARD COATINGS; MAGNETRON SPUTTER ION PLATING; POLYBUTYLENETEREPHTHALATE;

CERAMIC COATINGS;

EID: 0032184144     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00627-6     Document Type: Article

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