|
Volumn 53, Issue 13, 2006, Pages 1919-1925
|
A new three-zone amplitude-only filter for increasing the focal depth of near-field solid immersion lens systems
|
Author keywords
[No Author keywords available]
|
Indexed keywords
COMPUTER SIMULATION;
NANOSTRUCTURED MATERIALS;
NUMERICAL ANALYSIS;
OPTICAL FILTERS;
PHOTOLITHOGRAPHY;
THREE DIMENSIONAL;
HIGH-DENSITY OPTICAL STORAGE;
PUPIL-PLANE FILTERS;
SOLID IMMERSION LENS (SIL) SYSTEMS;
LENSES;
|
EID: 33746798835
PISSN: 09500340
EISSN: 13623044
Source Type: Journal
DOI: 10.1080/09500340600679225 Document Type: Article |
Times cited : (12)
|
References (19)
|