![]() |
Volumn 89, Issue 4, 2006, Pages
|
Characteristics of sputtered Hf 1-xSi xO 2/Si/GaAs gate stacks
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CAPACITANCE-VOLTAGE (CV) MEASUREMENTS;
FREQUENCY DISPERSION;
GAAS GATE STACKS;
PHOTOLUMINESCENCE INTENSITY;
CAPACITANCE;
CMOS INTEGRATED CIRCUITS;
DIELECTRIC DEVICES;
PHOTOLUMINESCENCE;
SEMICONDUCTING GALLIUM ARSENIDE;
SILICON COMPOUNDS;
STACKING FAULTS;
HAFNIUM COMPOUNDS;
|
EID: 33746594936
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2234304 Document Type: Conference Paper |
Times cited : (26)
|
References (11)
|