High-resolution picosecond acoustic microscopy for non-invasive characterization of buried interfaces

Journal of Materials Research

Volumn 21, Issue 5, 2006, Pages 1204-1208

  Ramanathan, Shriram ^a,b   Cahill, David G ^c  

^a INTEL CORPORATION   (United States)

^b HARVARD UNIVERSITY   (United States)

^c University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; IMAGING TECHNIQUES; INTERFACES (MATERIALS); MULTILAYERS; SILICON WAFERS;

BURIED INTERFACES; HIGH LATERAL SPATIAL RESOLUTION; NON-INVASIVE CHARACTERIZATION;

ACOUSTIC MICROSCOPES;

EID: 33746494164     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2006.0141     Document Type: Article

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