Synthesis of crystalline carbon nitride by microwave plasma chemical vapor deposition

Materials Science Forum

Volumn 480-481, Issue , 2005, Pages 71-76

  Jiang, Jinchun ^a   Cheng, Wenjuan ^a   Zhang, Yang ^a   Zhu, Hesun ^a   Shen, Dezhong ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Advanced materials; Carbon nitride; Chemical vapor deposition

Indexed keywords

CRYSTALLITES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION;

ADVANCED MATERIALS; CARBON NITRIDE FILMS; HEXAGONAL CRYSTALLITES;

CARBON NITRIDE;

EID: 33746358700     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-962-8.71     Document Type: Conference Paper

References (12)

1. A. Y Liu and M. L. Cohen, Science 245 (1989), p. 841
2. D. M. Teter and R. J. Hemley, Science 271 (1996), p. 53
3. Y. J. Guo and W. A. Goddard III, Chem. Phys. Lett. 237 (1995), p. 72
4. J. Ortega and O. F. Sankey, Phys. Rev. B 51 (1995), p. 2624
5. M. Cote and M. L. Cohen, Phys. Rev. B 55 (1997), p. 5684
6. C Niu, Y. Z. Lu, C. M. Lieber, Science 261 (1993), p. 334
7. A. Hoffman, I. Gouzman, and R. Brener, Appl. Phys. Lett. 64 (1994), p. 845
8. K. M. Yu, M. L. Cohen, E. E. Haller, W. L. Hansen, A. Y. Liu, And I. C. Wu, Phys. Rev. B 49 (1994), p. 5034
9. Y. Tani, Y. Aoi, and E. Kamijo, Appl. Phys. Lett. 73 (1998), p. 1652
10. E. G. Wang, Adv. Mater. 11 (1999), p. 1129
11. D. Marton, K. I. Boyd, A. H. Albayati, S. S. Todoro, and J. W. Rabalais, Phys. Rev. Lett. 73 (1994), p. 118
12. L. C Chen, D. M. Bhusari, C. Y. Yang, K. H. Chen, T. J. Chuang, M. C. Lin, C. K. Chen, Y F. Huang, Thin Solid Films 303 (1997), p. 66