Ion density distribution in an inductively coupled plasma chamber

Plasma Science and Technology

Volumn 6, Issue 2, 2004, Pages 2233-2236

  Chen, Junfang ^a   Zhao, Wenfeng ^a   Wu, Xianqiu ^a   Fan, Shuangli ^a   Fu, Silie ^a  

^a SOUTH CHINA NORMAL UNIVERSITY   (China)

Author keywords

Angmuir probe; Inductively coupled plasma; Ion density distribution

Indexed keywords

ELECTRIC POWER SYSTEMS; IONS;

ANGMUIR PROBE; ION DENSITY DISTRIBUTION;

INDUCTIVELY COUPLED PLASMA;

EID: 33746340567     PISSN: 10090630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-0630/6/2/009     Document Type: Article

References (7)

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