Stabilizing inductively coupled plasma source impedance and plasma uniformity using a Faraday shield

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 3, 2001, Pages 785-792

  Khater, M H ^a   Overzet, L J ^a  

^a The University of Texas at Dallas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC COILS; ELECTRIC TRANSFORMERS; ELECTROMAGNETIC FIELD EFFECTS; OPTIMIZATION; STANDING WAVE METERS;

FARADAY SHIELD;

INDUCTIVELY COUPLED PLASMA;

EID: 0035334040     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1355763     Document Type: Article

References (14)