Simultaneous control of numerical enhancement of N atoms and decrease in heat flux into reaction chamber using Ar-N2 pulse-modulated induction thermal plasmas

Applied Physics Letters

Volumn 89, Issue 3, 2006, Pages

  Tanaka, Yasunori ^a   Muroya, Takafumi ^a   Hayashi, Kouhei ^a   Uesugi, Yoshihiko ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; EMISSION SPECTROSCOPY; HEAT FLUX; PLASMA TORCHES; PULSE MODULATION; TEMPERATURE MEASUREMENT;

AR-N2 PULSE-MODULATED INDUCTION THERMAL PLASMAS; COIL CURRENT; REACTION CHAMBER;

NITROGEN;

EID: 33746320732     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2226994     Document Type: Article

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