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Volumn 89, Issue 3, 2006, Pages
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Room temperature bonding of silicon and lithium niobate
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Author keywords
[No Author keywords available]
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Indexed keywords
INTERFACIAL LAYERS;
PULLING ANGLES;
ROOM TEMPERATURE;
VISUAL INSPECTION;
AMORPHOUS SILICON;
BINDING ENERGY;
CHEMICAL BONDS;
ELECTRON ENERGY LOSS SPECTROSCOPY;
NANOSTRUCTURED MATERIALS;
SILICON WAFERS;
LITHIUM COMPOUNDS;
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EID: 33746317776
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2229262 Document Type: Article |
Times cited : (63)
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References (11)
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