R. F. magnetron sputtering deposition of hetero-epitaxial Sr xBa 1-xNb 2O 6 thin Films: The Role of Temperature

Ferroelectrics

Volumn 288, Issue , 2003, Pages 159-168

  Cuniot Ponsard, M ^a   Desvignes, J M ^a   Leroy, E ^b  

^a INSTITUT D'OPTIQUE GRADUATE SCHOOL   (France)

^b Laboratorie Chim Metall Terres R   (France)

Author keywords

R.F. magnetron sputtering; SBN thin films; Temperature

Indexed keywords

OPTICAL TRANSPARENCY; R.F. MAGNETRON SPUTTERING; SBN THIN FILMS;

AMORPHOUS FILMS; CRYSTALLIZATION; ELECTROOPTICAL EFFECTS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; STOICHIOMETRY; WAVEGUIDES;

THIN FILMS;

EID: 33746312919     PISSN: 00150193     EISSN: 15635112     Source Type: Conference Proceeding    
DOI: 10.1080/00150190390211918     Document Type: Conference Paper

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