Crystallization of Sr0.5Ba0.5Nb2O6 thin films on LaNiO3 electrodes by RF magnetron reactive sputtering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 2 A, 2000, Pages 545-550

  Jong, Chao An ^a   Gan, Jon Yiew ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Ferroelectric; Niobium film; Rapid thermal annealing; rf magnetron sputtering; Strontium barium

Indexed keywords

COMPUTATIONAL METHODS; CRYSTAL ORIENTATION; CRYSTALLIZATION; DIFFUSION IN SOLIDS; ELECTRODES; ELECTRON SPECTROSCOPY; LANTHANUM COMPOUNDS; MAGNETRON SPUTTERING; RAPID THERMAL ANNEALING; SECONDARY ION MASS SPECTROMETRY; STOICHIOMETRY; THIN FILMS;

ELECTRON SPECTROSCOPY OF CHEMICAL ANALYSIS (ESCA); MAGNETRON REACTIVE SPUTTERING; STRONTIUM BARIUM NIOBIUM;

STRONTIUM COMPOUNDS;

EID: 0033901639     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.545     Document Type: Article

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