Processing of a semiconductor wafer using the femtosecond laser directly from an oscillator

Journal of Micromechanics and Microengineering

Volumn 16, Issue 8, 2006, Pages 1587-1592

  Venkatakrishnan, Krishnan ^a   Tan, Bo ^a  

^a RYERSON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

FAILURE ANALYSIS; INTEGRATED CIRCUITS; LASER PULSES; OPTICAL RESOLVING POWER; OSCILLATORS (ELECTRONIC); SILICON WAFERS;

FEMTOSECOND LASER PULSE; FOCUSED ION BEAM (FIB); SEMICONDUCTOR WAFER;

SEMICONDUCTOR DEVICES;

EID: 33746271005     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/8/020     Document Type: Article

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