Submicron holes in copper thin film directly ablated using femtosecond pulsed laser

Optical Engineering

Volumn 40, Issue 12, 2001, Pages 2892-2893

  Venkatakrishnan, K ^a   Tan, B ^a   Ngol, B K A ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Femtosecond pulsed laser; Laser ablation

Indexed keywords

AMPLIFICATION; COPPER; LASER ABLATION; LASER PULSES; MICROELECTRONICS; SCANNING ELECTRON MICROSCOPY; SECOND HARMONIC GENERATION;

FEMTOSECOND PULSED LASER;

THIN FILMS;

EID: 0035721348     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1419024     Document Type: Article

References (2)

1. Machining of submicron holes using a femtosecond laser at 800 nm
2. Submicron lines in thin metallic films micromachined by an ultrafast laser oscillator