Fabrication of nanoimprinted curved feature for focusing grating coupler using hydrogen silsesquioxane mold

Current Applied Physics

Volumn 6, Issue SUPPL. 1, 2006, Pages

  Ryu, Hojun ^a   Suh, Dongwoo ^a   Paek, Mun Cheol ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Curved features; Hydrogen silsesquioxane; Nanoimprinted; Optical

Indexed keywords

COATINGS; MOLDS; OPTICAL DEVICES;

CURVED FEATURES; HYDROGEN SILSESQUIOXANE; NANOIMPRINTED; OPTICAL;

NANOTECHNOLOGY;

EID: 33746257200     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2006.01.023     Document Type: Article

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