Fabrication of focusing grating coupler using e-beam lithographed hydrogen silsesquioxane

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 5 B, 2005, Pages 3416-3417

  Ryu, Hojun ^a   Suh, Dongwoo ^a   Park, Yongwoo ^a   Paek, Mun Cheol ^a   Kang, Kwangyong ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Blue wavelength; Focusing waveguide grating; Hydrogen silsesquioxane; Out coupling efficiency; Spot size

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; ELECTRON BEAM LITHOGRAPHY; HOLOGRAMS; HYDROGEN INORGANIC COMPOUNDS; LIGHT PROPAGATION; NEAR FIELD SCANNING OPTICAL MICROSCOPY; OPTICAL DEVICES; OPTICAL WAVEGUIDES; REFRACTIVE INDEX;

BLUE WAVELENGTH; FOCUSING WAVEGUIDE GRATINGS; HYDROGEN SILSESQUIOXANE; OUT-COUPLING EFFICIENCY; SPOT SIZE;

DIFFRACTION GRATINGS;

EID: 23144443621     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.3416     Document Type: Conference Paper

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