TV/4 dual-band HgCdTe infrared focal plane arrays with a 25-μm pitch and spatial coherence

Journal of Electronic Materials

Volumn 35, Issue 6, 2006, Pages 1153-1158

  Baylet, J ^a   Ballet, P ^a   Castelein, P ^a   Rothan, F ^a   Gravrand, O ^a   Fendler, M ^a   Laffosse, E ^a   Zanatta, J P ^a   Chamonal, J P ^a   Million, A ^a   Destefanis, G ^a  

^a CEA LETI   (France)

Author keywords

Dry etching, molecular beam epitaxy (MBE); Dual band infrared detectors; Focal plane arrays (FPA); HgCdTe

Indexed keywords

DRY ETCHING, MOLECULAR BEAM EPITAXY (MBE); DUAL-BAND INFRARED DETECTORS; FOCAL PLANE ARRAYS (FPA); HGCDTE;

DRY ETCHING; INFRARED DETECTORS; MERCURY COMPOUNDS; MOLECULAR BEAM EPITAXY; PHOTODIODES;

ARRAYS;

EID: 33746216398     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-006-0235-5     Document Type: Conference Paper

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