Brillouin light scattering studies of the mechanical properties of ultrathin low-k dielectric films

Journal of Applied Physics

Volumn 100, Issue 1, 2006, Pages

  Link, A ^a   Sooryakumar, R ^a   Bandhu, R S ^a   Antonelli, G A ^b,c  

^a OHIO STATE UNIVERSITY   (United States)

^b INTEL CORPORATION   (United States)

^c BROWN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PICOSECOND LASER ULTRASONICS; STANDING WAVE ACOUSTIC RESONANCES; TIME DELAYS; WAVE VECTORS;

BRILLOUIN SCATTERING; INTEGRATED CIRCUITS; MECHANICAL PROPERTIES; NONDESTRUCTIVE EXAMINATION; SILICA; ULTRASONICS; ULTRATHIN FILMS;

DIELECTRIC FILMS;

EID: 33746216149     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2209428     Document Type: Article

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