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Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 454-457
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High lateral resolution 2D mapping of the B/C ratio in a boron carbide film formed by femtosecond pulsed laser deposition
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Author keywords
Boron carbide; Chemical composition; Microbeam; Pulsed laser deposition; Rutherford backscattering spectrometry; Thickness profile
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Indexed keywords
BORON CARBIDE;
COMPOSITION;
MAPPING;
OPTICAL RESOLVING POWER;
PULSED LASER DEPOSITION;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
ELEMENTAL COMPOSITION;
MICROBEAMS;
THICKNESS PROFILE;
THIN FILMS;
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EID: 33745962652
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2006.03.030 Document Type: Article |
Times cited : (15)
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References (26)
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