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Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 230-233
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A technique to study the lattice location of light elements in silicon by channeling elastic recoil detection analysis
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Author keywords
Angular scan; Channeling elastic recoil detection; Hydrogen in silicon
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Indexed keywords
CRYSTALLINE MATERIALS;
ELASTICITY;
HYDROGEN;
ION BEAMS;
LATTICE CONSTANTS;
ANGULAR SCAN;
CHANNELING ELASTIC RECOIL DETECTION;
HYDROGEN IN SILICON;
SILICON;
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EID: 33745948148
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2006.04.004 Document Type: Article |
Times cited : (2)
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References (16)
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