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Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 230-233

A technique to study the lattice location of light elements in silicon by channeling elastic recoil detection analysis

Author keywords

Angular scan; Channeling elastic recoil detection; Hydrogen in silicon

Indexed keywords

CRYSTALLINE MATERIALS; ELASTICITY; HYDROGEN; ION BEAMS; LATTICE CONSTANTS;

EID: 33745948148     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.04.004     Document Type: Article
Times cited : (2)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.