A technique to study the lattice location of light elements in silicon by channeling elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 230-233

  Shao, Lin ^a   Wang, Y Q ^a   Nastasi, M ^a   Mayer, J W ^b  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b AZ 85281   (United States)

Author keywords

Angular scan; Channeling elastic recoil detection; Hydrogen in silicon

Indexed keywords

CRYSTALLINE MATERIALS; ELASTICITY; HYDROGEN; ION BEAMS; LATTICE CONSTANTS;

ANGULAR SCAN; CHANNELING ELASTIC RECOIL DETECTION; HYDROGEN IN SILICON;

SILICON;

EID: 33745948148     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.04.004     Document Type: Article

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