SAXS analysis of the effect of H2 dilution on microstructural changes of HWCVD deposited a-SiC : H

Materials Letters

Volumn 60, Issue 21-22, 2006, Pages 2767-2772

  Swain, Bibhu P ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

a SiC : H; HWCVD deposition; Microstructure; SAXS; XRR

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN; PORE SIZE; POROSITY; X RAY SCATTERING;

A-SIC : H; GUINER PLOT; HWCVD DEPOSITION; POROD PLOT; SAXS; XRR;

CHEMICAL VAPOR DEPOSITION;

EID: 33745898851     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2006.01.087     Document Type: Article

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